Institute of Microengineering and Nanoelectronics

 Institute of Microengineering and Nanoelectronics

MEMS/NEMS and Nanoelectronics

slide set mems

  • Develops miniature sensor and actuator systems using microfabrication.
  • Research areas:MEMS wafer level packaging, RF MEMS, BioMEMS, and biometrics extraction.
  • Focus: creating high-performance, low-cost sensors and actuators for automotive, telecommunications, and biomedical applications.
  • Project outcomes: commercialized products, academic knowledge, and skilled labor development.

Group Leader

Prof. Dato` Dr. Burhanuddin Yeop Majlis, (MEMS/ NEMS technology, Microelectronics and microfabrication, MEMS microstructure and sensing devices, RF MEMS and BIOMEMS, Lab-on Chip and MBE technology)

Group Members

Research Projects

  • RF MEMS and RFIC
  • MEMS Loudspeakers and microphones
  • MEMS Microgenerators
  • MEMS Sensor and actuators
  • MEMS Microfluidics
  • MEMS Micropumps, Microvalves and Microneedles
  • Biocell Filters, separators and detectors
  • Nano Lab-on-Chip
  • Nanotube and Nanowires
  • Graphene based NEMS devices
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