MEMS Characterization

  1. Fourier Transform Infrared (FTIR) (FTS 3000MX)
  2. Philips XL20 Scanning Electron Microscope (Philips XL 30 Series)
  3. VEECO surface profiler (WYKO NT1100)
  4. Leica Material Workstation (Leica DMLA)
  5. Thickness Mapping System (Filmetrics F50-2000)
  6. DACTRON shaker
  7. Probe station (Micromanipulator)
  8. PZT Testing
  9. Ellipsometer (Melles Griot 05-LHP-321)
  10. SECA Microscope
  11. Osciloscope, Le Croy
  12. TENCOR surface profiler
  13. Laser Displacement Meter
  14. LCR Meter
  15. IV-CV Meter
  16. KEYENCE Displacement Meter