Institute of Microengineering and Nanoelectronics

 Institute of Microengineering and Nanoelectronics

Fabrication

Deposition

  1. E-Gun
  2. Electron Beam Evaporator
  3. Dip CuaGer
  4. Spin Coater
  5. Furnace

Lithography

  1. Photo Luminescence Spectrometer
  2. Fluorescent & Luminance Measurement

Other machines / facilities

  1. Glove Box System
  2. Helium HC70 Compressor Unit
  3. Tape Bonding
  4. Material printer
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