IMEN

 
 
 
 
 
 
 
 

Characterization

MEMS Lab - Characterization

Characterization

  1. Fourier Transform Infrared (FTIR) (FTS 3000MX)
  2. Philips XL20 Scanning Electron Microscope (Philips XL 30 Series)
  3. VEECO surface profiler (WYKO NT1100)
  4. Leica Material Workstation (Leica DMLA)
  5. Thickness Mapping System (Filmetrics F50-2000)
  6. DACTRON shaker
  7. Probe station (Micromanipulator)
  8. PZT Testing
  9. Ellipsometer (Melles Griot 05-LHP-321)
  10. SECA Microscope
  11. Osciloscope, Le Croy
  12. TENCOR surface profiler
 
 
 
 

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Institute of Microengineering and Nanoelectronics (IMEN)
Aras 4, Kompleks Penyelidikan
Universiti Kebangsaan Malaysia
43600 UKM-Bangi, Selangor, Malaysia
Tel. +603-89118020
Fax. +603-89250439
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