Sains Malaysiana 47(3)(2018): 619–633

http://dx.doi.org/10.17576/jsm-2018-4703-24

 

Peranti Suis Nanoelektromekanikal (NEM) Berunsurkan Grafin dan Tiub Nano Karbon (CNT)

(Nanoelectromechanical Switch Devices Based on Graphene and Carbon Nanotube (CNT))

 

MOHD AMIR ZULKEFLI, MOHD AMBRI MOHAMED*, KIM S SIOW & BURHANUDDIN YEOP MAJLIS

 

Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 UKM Bangi, Selangor Darul Ehsan, Malaysia

 

Received: 3 Julai 2017/Accepted: 23 October 2017

 

ABSTRAK

 

Suis nanoelektromekanikal (NEM) mempunyai persamaan dengan suis konvensional semikonduktor apabila digunakan sebagai transistor dan penderia walaupun prinsip operasinya berbeza. Perbezaan prinsip operasi suis ini memberikan kelebihan kepada suis NEM untuk beroperasi dalam persekitaran yang melampau manakala suis konvensional semikonduktor mempunyai kelebihan daripada segi infrastruktur fabrikasi yang canggih. Dalam kertas ini, kami mengulas kemajuan terbaru dan potensi teknologi NEM dalam aplikasi pensuisan berdasarkan bahan berasaskan karbon seperti CNT dan grafin. Kemajuan reka bentuk geometri suis NEM seperti struktur rusuk berlubang, mempunyai kelebihan daripada segi voltan operasi peranti yang rendah, turut dibincangkan dalam kertas ini. Berdasarkan Kitaran Gemburan Gartner, teknologi, proses dan produk untuk suis NEM atau hibrid NEM-CMOS berada di takuk berbeza iaitu di jurang ilusi, cerun pencerahan dan dataran tinggi produktiviti. Kemudian, reka bentuk geometri suis NEM berasaskan bahan-bahan ini diulas dengan lengkap berdasarkan kajian kepustakaan terbaru. Kami mengenal pasti cabaran yang terlibat dalam proses fabrikasi suis NEM berasaskan CNT dan grafin seperti kebocoran get dan proses litografi yang mencabar. Kesimpulannya, kami meringkaskan kertas kajian ini kepada beberapa sudut perspektif, pandangan dan peluang pada masa depan dalam teknologi suis NEM.

 

Kata kunci: Bahan karbon; grafin; nanoelektromekanikal (NEM); suis NEM; tiub nano karbon (CNT)

 

ABSTRACT

 

Nanoelectromechanical (NEM) switches are similar to the conventional semiconductor switches when used as a transistor and sensor, in spite of their fundamental differences in operating principles. This difference in operation allows NEM switches to perform better in harsh conditions while conventional semiconductor switch has the advantage of matured technology in fabrication. In this paper, we reviewed the recent progress and potential of NEM technology in switching applications based on carbon-based materials focusing on CNT and graphene. The progress in geometrical design like perforated beam structure, which can reduce its operation voltage, was also discussed. Based on Gartner Hype Cycle, the technology, process and product of NEM switch or hybrid NEM-CMOS switch was located at various stages such as the trough of disillusionment, slope enlightment and plateau of productivity, respectively. Then, the geometrical design of NEM switch based on these materials was reviewed from the recent literatures. We also identified the challenges involved in fabrication of CNT and graphene based NEM switch technology, such as, short channel effect, gate leakage and challenge in lithography process. Finally, we concluded this paper with a few perspectives, insights and opportunities in NEM switch technology.

 

Keywords: Carbon-based material; carbon nanotube (CNT); graphene; nanoelectromechanical (NEM); NEM switch

 

 

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*Corresponding author; email: ambri@ukm.edu.my

 

 

 

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