Sains Malaysiana 37(1):  85-88(2008)

 

Kesan Suhu Sepuh Lindap ke atas Mikrostruktur,

Morfologi Permukaan dan Komposisi Filem Nipis Ba0.5Sr0.5tio3

yang Disediakan dengan Kaedah Sol Gel

(The Effect of  Annealing Temperature on the Microstructure, Surface 
Morphology and Compositions of Ba0.5Sr0.5TiO3 Thin Films Prepared
by the Sol-Gel Method)

 

 

Rahmi Dewi, Noor Baa'yah Ibrahim & Ibrahim Abu Talib

Fakulti Sains & Teknologi, Universiti Kebangsaan Malaysia

43600 UKM Bangi, Selangor D.E. Malaysia

 Diserahkan:  6 Februari 2007 / Diterima:  12 Jun 2007

 

ABSTRAK

Pada umumnya, proses sol–gel melibatkan peralihan dari sistem larutan cecair iaitu “sol” ke fasa pepejal yang disebut “gel”. Dalam kajian ini filem nipis Ba0.5Sr0.5TiO3 (BST) telah dihasilkan dengan menggunakan kaedah sol-gel menggunakan Ba(C4H6O4), Sr(CH3CO2)4 dan (Ti(OCHCH3)2)4. Filem yang terhasil disepuhlindap pada suhu 6000C, 6500C dan 7000C selama 1 jam dalam persekitaran udara biasa. Mikrostruktur, morfologi dan komposisi unsur filem tersepuhlindap ditentukan  menggunakan XRD, AFM dan EDS. Dari hasil pencirian diperoleh semakin tinggi suhu sepuhlindap penghabluran filem dan kekasaran permukaan semakin meningkat. Nisbah Ba/Sr berkurangan dengan kenaikan suhu sepuhlindap.

Kata kunci: Filem nipis Ba0.5Sr0.5TiO3; kaedah sol-gel; suhu sepuhlindap

 

 

ABSTRACT

In general, the sol-gel process involves the transition of a solution system from a liquid "sol" into a solid "gel" phase. In this study, Ba0.5Sr0.5TiO3 (BST) thin films have been prepared by the sol-gel technique using starting materials, Ba(C4H6O4), Sr(CH3CO2)4 and (Ti(OCHCH3)2)4. The thin films were annealed at temperature at 6000C, 6500C and 7000C for 1 hour in atmosphere. The microstructure, morphologies and compositions of the films that were annealed were determined using XRD, AFM and EDS techniques. The results show that increasing the annealing temperature increased the crystallinity and surface roughness of the films. The Ba/Sr ratio decreased when the annealing temperature increased.

Keywords:  Ba0.5Sr0.5TiOthin films; sol-gel technique; annealing temperature

 

RUJUKAN/REFERENCES 

Adikary, S.U & Chan, H.L.W. 2003. Ferroelectric and dielectric properties of sol-gel derived BaxSr1-xTiO3 thin films. Thin solid Films 424: 70-74.

Brinker, C. J & Scherer, G. W. 1990. Sol-Gel Science The Physics and Chemistry of Sol-Gel Processing, New York: Academic Press.

Chen.X., Lu.W.,Zhu.W.,Lim.S.Y.,Akbar.S.A. 2003. Structure and thermal analyses on phase evolution of sol-gel (Ba,Sr)TiO3 thin films. Surface and Coat Tech. 167: 203-206.

Ezhilvalavan, S & Tseund, Y.T. 2000. Progress in the developments of (Ba,Sr)TiO3 (BST) thin films for Gigabit era DRAMS. Materials Chemistry and Physics 65: 227-248.

Majed, S.M & Naik. R. 1996. Microstructure and ferroelectric properties of fine-grained BaxSr1-xTiO3 thin films prepared by metalorganic decomposition. J. Mater. Res.10: 2588-2593.

Noda, M., Hashimoto, K., Kubo, R., Tanaka, H., Mukaigawa, T., Xu, H. & Okuyama, M. 1999. A. new type of dielectric bolometer mode of detectore pixel using ferroelectric thin film capacitors for infrared image sensor. Sensor and Actuators 77: 39-44.

Paik.D.S., Rao.A.V.P., Komarneni.S. 1997. Ba Titanate and barium/strontium titanate thin films from hydroxide precursors: preparation and ferroelectric behavior. J.Sol-Gel Sci and Tech. 10: 213-220.

Saha, S & Krupanidhi, S.B. 1999. Study of electrical properties of pulsed laser ablated (Ba0.5Sr0.5TiO3) thin films. Material Science and Engineering 2 57: 135-146.

Tcheliebou, F., Ryu, H.S., C.K., Park, W.S. & Baik,S. 1997. On the microstructure and optical properties of Ba0.5Sr0.5TiO3 films. Thin Solid Films 299: 14-17.

Tsuzuki A., Kato K., Kusumoto. K., Torh. Y. 1998. Preparation and characterization of (Ba1-xSrx)TiO3 films by sol-gel processing.  J. Mater. Sci 33: 3055-3058.

Te,H.F.,Win,J.C.,Chao,M.L.,Liang,W.J.,Yee,S.C.,Yu,J.H. 2006. Effect of annealing on the structural and mechanical properties of Ba0.7Sr0.3TiO3 thin films. J. Mater. Sci.  and Eng. A 426: 157-161.

Zhu, H., Miao ,J., Noda, M & Okuyama, M. 2004. Preparation of BST ferroelectric thin film by metal organic decomposition for infrared sensor. Sensors and Actuators A 110: 371-377.

Zhang, T.J. & Ni, H. 2002. Fabrication and electrical properties of Ba0.64Sr0.36TiO3 thin films by sol-gel on platinum coated silicon. J. Mater. Sci. 37: 4155-4158.

 

 

sebelumnya