Sains Malaysiana 41(8)(2012): 1029–1035

 

 

Effect of Different TiO2 Preparation Techniques on the Performance of the Dielectric

Bolometer Ba06Sr0.4TiO3 as a Distance Sensor

(Kesan Kaedah Penyediaan TiO2 yang Berbeza Terhadap Prestasi Bolometer

Dielektrik Ba06Sr0.4TiO3 sebagai Pengesan Jarak)

 

N.B. Ibrahim*, E. Yusrianto & Z. Ibarahim

School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia

43600 Bangi, Selangor, Malaysia

 

Diserahkan: 25 Januari 2010 / Diterima: 25 Mac 2011

 

ABSTRACT

 

In this study TiO2 films have been prepared using two different techniques i.e. sol-gel and electron gun evaporation (e-gun) techniques. The films were annealed at 300, 350 and 400oC in air. The microstructure study using field emission scanning electron microscopy and x-ray diffractometer showed nanometer grains size and only the film prepared by sol-gel and annealed at 400oC has anatase phase while others are amorphous. To study the effect of the films (as buffer layer) onto the dielectric bolometer Ba0.6Sr0.4TiO3 as distance sensor, sensors with the configuration of Al/BST/TiO2/RuO2/SiO2/Si were built. Two different measurements i.e. with and without infrared source were carried out to measure the sensitivity and repeatability of the sensors. The sensors which contained sol-gel TiO2 films gave reading for both type of measurements, indicating that the sensor can act as active and passive sensors. However, the sensors which contained e-gun TiO2 films only gave responses when the IR source was used, indicating that they can only act as passive sensors. The most sensitive sensor was TiO2 film prepared by sol gel and annealed at 350oC. In general sensors

which contained TiO2 films prepared by sol gel showed good repeatability.

 

Keywords: Sol-gel; thin film; TiO2

ABSTRAK

Dalam kajian ini, filem TiO2 telah disediakan dengan dua teknik yang berbeza iaitu teknik sol-gel dan penyejatan senapang elektron (senapang-e). Filem kemudiannya disepuhlindap pada 300, 350 dan 400oC dalam udara biasa. Kajian mikrostruktur menggunakan mikroskop elektron imbasan pemancaran medan (FE-SEM) dan pembelauan sinar-X menunjukkan kesemua filem mempunyai saiz butiran nanometer dan hanya filem yang disediakan dengan sol-gel dan disepuhindap pada 400oC mempunyai fasa anatas sementara yang lain adalah amorfus. Untuk mengkaji kesan filem tersebut (sebagai lapisan penimbal) ke atas bolometer dielektrik Ba0.6Sr0.4TiO3 sebagai pengesan jarak, sensor dengan konfigurasi Al/BST/TiO2/RuO2/SiO2/Si telah dibina. Dua pengukuran yang berbeza iaitu dengan dan tanpa punca inframerah telah dijalankan untuk mengukur kesensitifan dan kebolehulangan pengesan. Pengesan yang mengandungi filem TiO2 sol-gel memberikan bacaan untuk kedua-dua jenis pengukuran, menandakan pengesan ini boleh bertindak sebagai pengesan aktif dan pasif. Namun begitu, pengesan yang mengandungi filem TiO2 senapang-e hanya memberi tindak balas apabila punca inframerah digunakan, menandakan pengesan hanya boleh bertindak sebagai pengesan pasif. Pengesan yang paling sensitif adalah pengesan dengan filem TiO2 yang disediakan dengan sol-gel dan disepuhindap pada 350oC. Secara amnya pengesan yang mengandungi filem TiO2 yang disediakan dengan sol-gel menunjukkan kebolehulangan yang baik.

 

Kata kunci: Filem nipis; sol-gel; TiO2

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*Pengarang surat-menyurat; email: baayah@ukm.my

 

 

 

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