Sains Malaysiana 42(2)(2013): 183–186

 

Si Nanowires Produced by Very High Frequency Plasma Enhanced Chemical

Vapor Deposition (PECVD) via VLS Mechanism

(Kajian Dawai Nano Silikon (SiNW) Dihasilkan dengan Pemendapan Wap Kimia

Peneguh Plasma (PECVD) dengan Kaedah VLS)

 

Yussof Wahab1,2, Habib Hamidinezhad1,3* & Zulkafli Othaman1

1Ibnu Sina Institute for Fundamental Science Studies (IIS), Universiti Teknologi Malaysia

81310 Skudai, Johor, Malaysia

 

2UTM Razak School of Engineering and Advanced Technology, UTM  International Campus

Jalan Semarak, 54100 Kuala Lumpur, Malaysia

 

3Department of Physics, Faculty of Basic Sciences, University of Mazandaran

Pasdaran Street, Babolsar, 47415 Mazandaran, Iran

 

Diserahkan: 7 Januari 2012 / Diterima: 21 Mei 2012

 

ABSTRACT

Silicon nanowires (SiNWs) with diameter of about a few nanometers and length of 3 μm on silicon wafers were synthesized by very high frequency plasma enhanced chemical vapor deposition. Scanning electron microscopy (SEM) observations showed that the silicon nanowires were grown randomly and energy-dispersive X-ray spectroscopy analysis indicates that the nanowires have the composition of Si, Au and O elements. The SiNWs were characterized by high resolution transmission electron microscopy (HRTEM) and Raman spectroscopy. SEM micrographs displayed SiNWs that are needle-like with a diameter ranged from 30 nm at the top to 100 nm at the bottom of the wire and have length a few of micrometers. In addition, HRTEM showed that SiNWs consist of crystalline silicon core and amorphous silica layer.

 

Keywords: PECVD; silicon nanowire; VLS

ABSTRAK

Nanodawai silikon (SiNW) dengan diameter beberapa nanometer dan panjang 3 μm di atas wafer silikon telah dihasilkan dengan menggunakan pemendapan wap kimia peneguh plasma. Pemerhatian mikroskop elektron imbasan (SEM) menunjukkan nanodawai tumbuh secara rawak dan analisis spektrokopi serakan sinar-X menunjukkan nanodawai mengandungi unsur Si, Au dan O. Nanodawai silikon diukur menggunakan mikroskop transmisi elektron resolusi tinggi (HRTEM) dan spektroskopi Raman.  SEM menunjukkan bahawa SiNW adalah seperti jarum dengan diameter berjulat 30 nm di puncak hingga 100 nm di dasar dawai dan mempunyai panjang dalam beberapa mikrometer. Tambahan lagi, HRTEM membuktikan bahawa SiNW mengandungi teras hablur silikon dan lapisan silika amorfus.

 

Kata kunci: Nanodawai silikon; PECVD; VLS

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*Pengarang untuk surat-menyurat; email: habib_hamidinezhad@yahoo.com

 

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