Sains Malaysiana 42(2)(2013): 239–246

 

Effect of Al and N Doping on Structural and Optical Properties of Sol-gel Derived ZnO Thin Films

(Kesan Pengedopan Al dan N Terhadap Struktur dan Sifat Optik Filem Nipis ZnO yang Disediakan Melalui Kaedah Sol-Gel)

 

Chatpong Bangbai1*, Krisana Chongsri2, Wisanu Pecharapa3,4 & Wicharn Techitdheera1

 

1School of Applied Physics, King Mongkut’s Institute of Technology Ladkrabang

Ladkrabang, Bangkok, 10520, Thailand

 

2Department of Applied Physics, Faculty of Science and Technology

Rajabhat Rajanagarindra University, Chachoengsao, 24000, Thailand

 

3College of Nanotechnology, King Mongkut’s Institute of Technology Ladkrabang

Ladkrabang, Bangkok 10520, Thailand

 

4ThEP Center, CHE, 328 Siayuthtaya Rd. Bangkok, 10400, Thailand

 

Diserahkan: 7 Januari 2012/Diterima: 21 Mei 2012

 

 

ABSTRACT

In this work, the preparation of ZnO, N-doped ZnO (NZO), Al-doped ZnO (AZO) and Al, N-doped ZnO (ANZO) thin films by the sol-gel spin-coating method is reported. The structural properties and surface morphologies of films were characterized by X-ray diffraction (XRD) and field emission scanning electron microscope (FE-SEM). The optical properties of the films were interpreted from their transmission spectra using UV-VIS spectrophotometer. The XRD and SEM results disclosed that the crystallization quality and grain size of as-prepared films were highly influenced by N and Al doping. UV-VIS spectrophotometer results indicated that Al and N additives could significantly enhance the optical transparency and induce the blue-shift in optical bandgap of ZnO films.

 

Keywords: Al doping; N doping; sol-gel; ZnO thin films

 

ABSTRAK

Di dalam kajian ini, penyediaan saput tipis ZnO, N-terdop ZnO (NZO), Al-terdop ZnO (AZO) dan Al, N-terdop ZnO (ANZO) menggunakan kaedah salutan-putaran sol-gel dilaporkan. Sifat-sifat struktur dan morfologi permukaan filem dicirikan menggunakan pembelauan sinar-X (XRD) dan mikroskop imbasan elektron pancaran medan (FE-SEM). Sifat optik filem tersebut diperoleh daripada spektrum transmisi dengan menggunakan spektrofotometer UV-VIS. Keputusan XRD dan SEM membuktikan bahawa kualiti penghabluran dan saiz butiran filem yang disediakan sangat dipengaruhi oleh pendopan N dan Al. Keputusan UV-VIS spektrofotometer menunjukkan bahawa bahan tambahan Al dan N dapat meningkatkan kelutsinaran optik dan menpengaruhi anjakan biru antara jurang jalur optik filem ZnO secara signifikan.

 Kata kunci:  Pengedopan Al, pengedopan N; :saput tipis ZnO; sol-gel

 

 

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*Pengarang untuk surat-menyurat; email: chatpong_b@windowslive.com

 

 

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