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Sains Malaysiana 47(3)(2018):
619–633
http://dx.doi.org/10.17576/jsm-2018-4703-24
Peranti Suis Nanoelektromekanikal (NEM)
Berunsurkan Grafin dan Tiub Nano Karbon (CNT)
MOHD AMIR ZULKEFLI, MOHD AMBRI MOHAMED*, KIM S
SIOW & BURHANUDDIN YEOP MAJLIS
Institute of Microengineering and
Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 UKM Bangi,
Selangor Darul Ehsan, Malaysia
Diserahkan: 3 Julai 2017/Diterima: 23
Oktober 2017
ABSTRAK
Suis
nanoelektromekanikal (NEM) mempunyai persamaan dengan suis
konvensional semikonduktor apabila digunakan sebagai transistor dan penderia
walaupun prinsip operasinya berbeza. Perbezaan prinsip operasi suis ini
memberikan kelebihan kepada suis NEM untuk beroperasi dalam
persekitaran yang melampau manakala suis konvensional semikonduktor mempunyai
kelebihan daripada segi infrastruktur fabrikasi yang canggih. Dalam kertas ini,
kami mengulas kemajuan terbaru dan potensi teknologi NEM dalam
aplikasi pensuisan berdasarkan bahan berasaskan karbon seperti CNT dan
grafin. Kemajuan reka bentuk geometri suis NEM seperti
struktur rusuk berlubang, mempunyai kelebihan daripada segi voltan operasi
peranti yang rendah, turut dibincangkan dalam kertas ini. Berdasarkan Kitaran
Gemburan Gartner, teknologi, proses dan produk untuk suis NEM atau
hibrid NEM-CMOS berada di takuk berbeza iaitu di jurang ilusi,
cerun pencerahan dan dataran tinggi produktiviti. Kemudian, reka bentuk
geometri suis NEM berasaskan bahan-bahan ini diulas dengan lengkap
berdasarkan kajian kepustakaan terbaru. Kami mengenal pasti cabaran yang
terlibat dalam proses fabrikasi suis NEM berasaskan CNT dan
grafin seperti kebocoran get dan proses litografi yang mencabar. Kesimpulannya,
kami meringkaskan kertas kajian ini kepada beberapa sudut perspektif, pandangan
dan peluang pada masa depan dalam teknologi suis NEM.
Kata kunci:
Bahan karbon; grafin; nanoelektromekanikal (NEM);
suis NEM; tiub nano karbon (CNT)
ABSTRACT
Nanoelectromechanical
(NEM)
switches are similar to the conventional semiconductor switches
when used as a transistor and sensor, in spite of their fundamental
differences in operating principles. This difference in operation
allows NEM switches
to perform better in harsh conditions while conventional semiconductor
switch has the advantage of matured technology in fabrication. In
this paper, we reviewed the recent progress and potential of NEM technology
in switching applications based on carbon-based materials focusing
on CNT
and graphene. The progress in geometrical design like
perforated beam structure, which can reduce its operation voltage,
was also discussed. Based on Gartner Hype Cycle, the technology,
process and product of NEM switch
or hybrid NEM-CMOS switch was located at various stages such as the
trough of disillusionment, slope enlightment and plateau of productivity,
respectively. Then, the geometrical design of NEM switch based on these materials was
reviewed from the recent literatures. We also identified the challenges
involved in fabrication of CNT and graphene based NEM switch
technology, such as, short channel effect, gate leakage and challenge
in lithography process. Finally, we concluded this paper with a
few perspectives, insights and opportunities in NEM switch technology.
Keywords: Carbon-based material; carbon nanotube (CNT);
graphene; nanoelectromechanical (NEM); NEM switch
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*Pengarang untuk surat-menyurat; email: ambri@ukm.edu.my
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