{"id":386,"date":"2015-04-26T09:01:49","date_gmt":"2015-04-26T09:01:49","guid":{"rendered":"https:\/\/www.ukm.my\/imen\/?page_id=386"},"modified":"2022-10-28T12:50:39","modified_gmt":"2022-10-28T04:50:39","slug":"fabrication","status":"publish","type":"page","link":"https:\/\/www.ukm.my\/imen\/fabrication\/","title":{"rendered":"Fabrication"},"content":{"rendered":"
\n

Deposition<\/h3>\n
    \n
  1. LPCVD Oxidation Three Stack Furnace (KoyoLab)<\/li>\n
  2. DWL 66 Laser Write (Heidelberg DWL)<\/li>\n
  3. Plasma Enhanced Chemical Vapour Deposition (PECVD)<\/li>\n
  4. E-Beam Evaporator (Edwards Auto 306 Turbo)<\/li>\n
  5. Metal evaporator (Med 010 Balzers)<\/li>\n
  6. Sputter Coater (Baltec SCD-005)<\/li>\n
  7. Oxidation Furnace<\/li>\n
  8. DC\/RF Sputtering System (NTI Nanofilm)<\/li>\n<\/ol>\n

    Etching<\/h3>\n
      \n
    1. ICP PlasmaLab System 100 (Deep RIE)<\/li>\n
    2. Electrochemical Etch System (MEMS Potentiostat SC)<\/li>\n
    3. Plasma Enhanced Chemical Vapour Deposition (RIE)<\/li>\n<\/ol>\n

      Lithography<\/h3>\n
        \n
      1. Karl-Suss MJB Mask Aligner (Karl Suss)<\/li>\n
      2. Ceramic Hotplate (Fischer Scientific)<\/li>\n
      3. Coating Dispensing System – resist spinner (Spin Coater P6700)<\/li>\n
      4. Resist Spin Coater (Mikasa SpinCoater 1H-D3)<\/li>\n
      5. Thermolyne Hotplate (Thermolyne)<\/li>\n
      6. Programmable Spin CoaterOther machines \/ facilities<\/li>\n<\/ol>\n

        Other machines \/ facilities<\/h3>\n
          \n
        1. Wire bonding system (Kulicke & soffa 4500 Digital series)<\/li>\n
        2. Ultrasonic Cleaner (Brinson 1200)<\/li>\n
        3. Ozone cleaner (UVO cleaner 144AX-220)<\/li>\n
        4. Wafer scriber (Karl Suss)<\/li>\n
        5. General purpose oven<\/li>\n
        6. DI water system<\/li>\n
        7. Portable Liquid N2 tank<\/li>\n
        8. Chemical freezer<\/li>\n
        9. Wet station<\/li>\n
        10. Eye wash station<\/li>\n
        11. Fumehood \/ Wetbench<\/li>\n<\/ol>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

          Deposition LPCVD Oxidation Three Stack Furnace (KoyoLab) DWL 66 Laser Write (Heidelberg DWL) Plasma Enhanced Chemical Vapour Deposition (PECVD) E-Beam Evaporator (Edwards Auto 306 Turbo) …<\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"open","ping_status":"open","template":"","meta":{"footnotes":""},"class_list":["post-386","page","type-page","status-publish","hentry"],"aioseo_notices":[],"aioseo_head":"\n\t\t\n\t\n\t\n\t\n\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t