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MEMS Switch
Contact Bouncing Mitigation using Novel Dual-Pulse Actuation Voltage
(Pengurangan Lantunan Sentuhan Suis MEMS Menggunakan Voltan Penggerak Dwi-Denyut Baru)
C.H. Lai*
& W.S.H. Wong
School of
Engineering and Science, Swinburne University
of Technology (Sarawak Campus)
Jalan Simpang Tiga, 93350 Kuching, Sarawak, Malaysia
Received: 15 July
2010 / Accepted: 3 September 2010
ABSTRACT
A novel dual-pulse
actuation voltage that reduces dielectric charging in micro-electromechanical
system (MEMS) switch and thus leading to a longer switch
lifetime, are shown to simultaneously mitigate MEMS switch
contact bouncing. A simple mass-spring-damper mathematical model is used to
simulate movement of the switch contact as the excitation voltage is applied.
The model shows that the novel dual-pulse voltages damped the acceleration of the
switch membrane as it approaches the contact point, eventually slowing it down
and minimizes the impact force. This has the effect of minimizing the
occurrence of contact bouncing. Practical experiment on the commercial TeraVicta TT712-68CSP MEMS switch
corroborates that the novel excitation voltages reduced bouncing.
Keywords: Contact
bouncing; micro-electromechanical system (MEMS);
radio frequency (RF); reliability
ABSTRAK
Voltan penggerak dwi-denyut baru yang mengurangkan pengecasan dielektrik dalam suis sistem mikro-elektromekanik (MEMS) seterusnya memberikan jangkahayat suis yang lebih panjang, telah didapati memperlahankan lantunan sentuhan suis MEMS. Satu model matematik jisim-spring-pelembap telah digunakan untuk mensimulasi pergerakan sentuhan suis semasa voltan pengujaan dikenakan. Model ini menunjukkan bahawa voltan dwi-denyut melembapkan pecutan membran suis apabila ia menghampiri titik sentuhan, seterusnya memperlahankannya dan meminimakan daya impak. Ini memberikan kesan mengurangkan kejadian lantunan sentuhan. Uji kaji praktikal ke atas suis komersil TeraVicta TT712-68CSP MEMS mengesahkan bahawa voltan pengujaan terbaharu mengurangkan lantunan.
Kata kunci: Frekuensi radio (RF); kebolehharapan; lantunan sentuhan; sistem mikro-elektromekanik (MEMS)
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*Corresponding author; email: wwong@swinburne.edu.my
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