Laboratory Equipment Usage Log – Cleanroom Please enable JavaScript in your browser to complete this form.Please enable JavaScript in your browser to complete this form.PTJ(UKM) / University / Industry *If you are from another PTJ, university or industry, please enter your organization's name.Email *Please provide your valid student email address before using the lab equipment. Failure to do so will result in the suspension of your equipment usage privileges.Equipment *SEM (JEOL)SEM (JEOL)Thin film mappingOptical microscope (Olympus)PECVDDC/RF sputterSputter coaterOxidation FurnaceRIEKarl-suss Mask AlignerMidas Single Side Mask AlignerResist Spin coaterProgrammable spin coaterLCR meterKeithley Semiconductor analyzerCorona DischargeDeveloper/hot plate (wet bench)Cleaning (wet bench)wet etching process (wet bench)Diamond cutterVeeco surface profilerXRDSelect the equipment you will be using today. Email Equipment / Usage Duration (Hourly) *1 hour2 hours3 hours4 hours5 hours6 hourssubmit Log/history No entries found. click to update log!