Laboratory Equipment Usage Log – MEMS Please enable JavaScript in your browser to complete this form.Please enable JavaScript in your browser to complete this form.PTJ(UKM) / University / Industry *If you are from another PTJ, university or industry, please enter your organization's name. (Hourly) Usage PTJ(UKM) Email *Please provide your valid student email address before using the lab equipment. Failure to do so will result in the suspension of your equipment usage privileges.Equipment *FESEM SIGMAFESEM SIGMAEBL SYSTEMShaker LDS V406XeF2 dry etching systemLaser displacement system meterEBL spin coater CY-SP4Plasma sputtering coaterLCR Meter 6020Select the equipment you will be using today.Usage Duration (Hourly) *1 hour2 hours3 hours4 hours5 hours6 hourssubmit Log/history No entries found. click to update log!