Systematic Micro/Nanofabrication Process Selection & Training Module: Integrated Learning Framework for CMOS & MEMS Manufacturing
Technology Overview
A comprehensive educational and training package developed by the Institute of Microengineering and Nanoelectronics (IMEN) at Universiti Kebangsaan Malaysia (UKM). This training curriculum establishes a structured approach to advanced semiconductor and MEMS manufacturing techniques. The core instructional workflow details the three critical pillars of microfabrication: additive material deposition [00:26], pattern transfer via photolithography (encompassing photoresist coating, UV exposure, and development) [00:34], and subtractive material etching or removal [01:08]. The complete turnkey module consists of lecture notes, visual slides, specialized case studies, and practical decision-making frameworks.
Problem Addressed
Traditional semiconductor engineering courses often focus exclusively on theoretical or isolated process descriptions without providing an overarching application logic. As a result, students and entry-level cleanroom trainees face a major knowledge gap when entering real-world manufacturing environments. They frequently struggle to evaluate how design constraints, technical feasibility, and economic viability interact when choosing an optimal production route for complex integrated circuits.
Key Innovation
The module’s core innovation is its systematic process selection methodology based on strict device “requirement lists.” Instead of treating fabrication as separate standalone stages, it unifies both CMOS and MEMS manufacturing steps into a singular, practical framework. This allows learners to balance real-world industry constraints—such as tool availability, geometric tolerances, scalability, and operational costs—directly against design specifications.
Performance Advantages
Applications
Intellectual Property Status
Copyright is fully owned by Universiti Kebangsaan Malaysia (UKM). The IP covers the structured process selection methodology, the custom instructional workflows, the learning design, and all associated training lecture materials and documentation.
Licensing & Collaboration
The module is actively available for regional and international academic licensing, deployment in commercial semiconductor training programs, and institutional integration. For licensing, institutional adoption, or partnership inquiries, please contact:
Value Proposition
A structured and industry-relevant training module that equips learners with the ability to systematically select and evaluate micro/nanofabrication processes, successfully bridging the gap between academic theory and real-world semiconductor manufacturing.
Contact
For licensing and collaboration inquiries:
Muhamad Ramdzan Buyong
Institute of Microengineering and Nanoelectronics (IMEN)
Universiti Kebangsaan Malaysia (UKM)
Portable and Wearable Peritoneal Dialysis Apparatus.
Technology Overview
A lightweight, wearable peritoneal dialysis device designed for patients with End Stage Renal Disease (ESRD). The system integrates a high-precision medical-grade dialysate pump, a smart controller unit, and a proprietary flowrate, occlusion, and bubble sensor unit into a compact housing. Powered by a high-capacity rechargeable battery, the apparatus features continuous internal tubing and Internet of Things (IoT) capabilities for remote, real-time vital monitoring.
Problem Addressed
Traditional ESRD treatments require patients to visit the hospital three times a week for 4-hour dialysis sessions. During these sessions, patients are confined to a bed and connected to large, stationary dialysis machines. This severely restricts daily activities, causes immobility-related health issues, ties up their schedules, and prevents them from traveling abroad.
Key Innovation
The integration of a low-noise dialysate pump with an advanced ultrasound/dry coupling sensor suite and an IoT framework in a wearable form factor (under 1kg). This combination enables safe, fully ambulatory dialysis while allowing doctors to remotely monitor real-time biochemical and infection markers without the patient needing to be in the hospital.
Performance Advantages
Applications
Home-based and ambulatory peritoneal dialysis, remote patient monitoring systems for healthcare providers, travel-ready medical equipment, and high-mobility ESRD disease management.
Intellectual Property Status
Patent filed (Ref: MY-202518-A) covering the portable apparatus structure, integrated sensor and pump mechanisms, IoT control and monitoring use, and related electronic assemblies.
Licensing & Collaboration
Available for licensing, joint development with medical device manufacturers, and healthcare provider/clinical qualification partnerships.
Value Proposition
A revolutionary wearable peritoneal dialysis system that maintains high treatment efficacy while restoring absolute freedom, mobility, and remote medical oversight to ESRD patients.
Wearable, Anti-Clogging Hemodialysis Device Using Dielectrophoretic Filtration.
Technology Overview
A novel hemodialysis device designed to mimic the human kidney’s natural glomerular filtration barrier (GFB) for artificial kidney applications. The technology integrates a passive nano-porous silicon membrane with active dielectrophoresis (DEP). By embedding tapered microelectrodes into the filter, it generates a non-uniform electric field that actively repels specific blood components (such as PBMCs, red blood cells, platelets, and macromolecules) away from the pores, enabling continuous, self-cleaning blood filtration.
Problem Addressed
Current hemodialysis requires large, non-portable machines, forcing patients to adhere to strict, frequent hospital visitation schedules. Existing passive filtration technologies (like hollow fiber membranes) are prone to clogging and lack the self-cleaning properties required to allow for sufficient miniaturization into a portable or wearable device.
Key Innovation
The integration of “contact” (size-based pore) and “contactless” (charge-based electrokinetic) filtration. Specially designed tapered DEP electrodes apply precise adjustment frequencies () to selectively exert lateral attraction and vertical repulsion forces ( and ) on targeted cells, actively preventing the porous membrane from clogging.
Performance Advantages
Applications
Wearable artificial kidneys, portable hemodialysis machines, Lab-on-a-Chip (LOC) blood processing and diagnostics, continuous renal replacement therapy (CRRT), and microfluidic biological separation systems.
Intellectual Property Status
Patent granted/published in Malaysia (MY-196074-A / App No. PI 2017704119) covering the device architecture, filtration methods, and the microfabrication process of the tapered electrodes and porous membrane.
Licensing & Collaboration
Available for exclusive or non-exclusive licensing, joint development with medical device manufacturers, and commercialization partnerships for artificial kidney and microfluidic applications.
Value Proposition
An actively self-cleaning, miniaturized dialyzer that overcomes the clogging limitations of traditional filters, unlocking the development of truly portable, wearable artificial kidneys that free patients from hospital-bound dialysis sessions.
High-efficiency lab-on-a-chip dielectrophoresis system for mid-range uremic toxin removal.
Technology Overview
A novel lab-on-a-chip dielectrophoresis (DEP) system designed to manipulate and extract targeted human metabolites, specifically mid-range uremic toxins (under 15,000 Da) like β-2 microglobulin (β-2M). The technology integrates an alternating current (AC) generator with tapered microelectrodes and continuous flow pumps to polarize and safely route targeted proteins into specialized channel outlets.
Problem Addressed
End-Stage Renal Disease (ESRD) patients rely on hemodialysis, but current dialyzers (both convective and diffusive) struggle to filter mid-range molecules (500 to 15,000 Da). The ineffective extraction of toxins like β-2M during standard dialysis can lead to severe health complications, including dialysis-related amyloidosis (amyloid cancer).
Key Innovation
The incorporation of tunable AC electrokinetics (between 3 to 1200kHz) within tapered microelectrodes to generate highly specific dielectrophoretic forces. This allows the system to actively sort targeted molecules using lateral attraction (pDEP) or vertical repulsion (nDEP), dynamically routing them away from healthy blood components.
Performance Advantages
Applications
Advanced hemodialysis systems, continuous renal replacement therapies (CRRT), microfluidic protein separation platforms, biomedical sensors, and clinical diagnostics for End-Stage Renal Disease (ESRD).
Intellectual Property Status
Patent application filed in Malaysia (App No. PI 2018002688) by Universiti Kebangsaan Malaysia (UKM). Covers the dielectrophoresis system design, microelectrode configuration, and the method of operating tunable AC frequencies for targeted metabolite manipulation.
Licensing & Collaboration
Available for exclusive or non-exclusive licensing, joint development with hemodialysis equipment and medical device manufacturers, and partnerships for clinical trials and upscaling.
Value Proposition
A highly targeted microfluidic filtration system that closes the gap in mid-range uremic toxin removal, significantly improving patient outcomes in hemodialysis by efficiently extracting dangerous β-2M proteins without damaging surrounding elements.